Identification code reader integrated with substrate carrier robot
AssigneeApplied Materials, Inc.
InventorsMartin R. Elliott, Jeffrey C. Hudgens
Life of this patent
Estimating the term…
Abstract
An ID code reader, adapted to read an ID code from a wafer cassette or other substrate carrier, is integrated with a substrate carrier handling robot. In one aspect, the robot includes a support structure, and a chassis mounted for movement on the support structure. In this aspect an ID code reader is mounted on the chassis or otherwise mounted for movement along with an end effector adapted to engage the substrate carrier.
Claims32
An apparatus adapted to move a substrate carrier, comprising:
- an end effector adapted to engage the substrate carrier;
- a support mechanism that linear guides the end effector for movement in at least one of a vertical direction and a horizontal direction;
- and
- an ID code reader mounted on the support mechanism for movement with the end effector.
A method of transporting a substrate carrier, comprising:
- providing a carrier-handling robot that includes an end effector adapted to engage the substrate carrier;
- and
- incorporating an ID code reader in the robot such that the robot moves the ID code reader with the end effector.
An apparatus adapted to move a substrate carrier, comprising:
- a support structure;
- a chassis mounted for movement on the support structure;
- an end effector mounted on the chassis and adapted to engage the substrate carrier;
- and
- an ID code reader mounted on the chassis.
An apparatus adapted to store substrate carriers comprising:
- a plurality of shelves each adapted to support a substrate carrier;
- and
- a carrier handler adapted to place substrate carriers on, and remove substrate carriers from, the shelves;
- wherein the carrier handler includes:
- an end effector adapted to engage a substrate carrier;
- a support mechanism that supports the end effector for movement in at least one of a vertical direction and a horizontal direction;
- and
- an ID code reader mounted on the support mechanism for movement with the end effector.
A substrate carrier handler, comprising:
- a support mechanism;
- an end effector adapted to engage a substrate carrier and moveably mounted on the support mechanism;
- a moving member moveably mounted on the support mechanism;
- and
- an ID code reader mounted on the moving member.
Dependencies are inferred from the claim text.