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AssigneeUnaxis Balzers Aktiengesellschaft
InventorsStephan Voser, Martin Dubs
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To generate an especially good heat transfer between a seating face of a storage plate support and a storage plate, during coating with a sputter source in a vacuum installation, the seating face of the storage plate support is slightly annularly convexly arched and the storage plate is clamped in the center as well as on its outer margin by a center mask and an outer mask against the arched seating face. Hereby an especially good heat transfer is attained with very low arching d, whereby the storage plate is treated gently and simultaneously, during the coating process, no layer thickness distribution problems occur through arching that is too large.
In a storage plate support (2) having a central axis (8) and for receiving a disk-shaped storage plate (1) having a central plate opening (5), and which is to be subjected to surface treatment in a vacuum apparatus, with a plate seating which forms a seating face (7) for the plate (1), an outer mask (3) for clamping the plate (1) peripherally against the support (2) and a clampable center mask (4) disposed in the region of the plate opening (5), the improvement comprising:
Dependencies are inferred from the claim text.