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US 2003/0069664 A1Published application
Method and device for sorting wafers
AssigneeInfineon Technologies AG
InventorsDirk Caspary, Dorit Kaulfuss
Life of this patent
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AssigneeInfineon Technologies AG
InventorsDirk Caspary, Dorit Kaulfuss
Estimating the term…
The invention relates to a method for sorting wafers (W) of a chip production operation from an initial state into an end state, the wafers (W) being at least partly identifiable on the basis of an information carrier as elements of a finite sequence, and in the initial state the wafers (W) being arranged in any desired sequence in compartments (s) of a holding device (H) and in the end state each wafer (W) being arranged as far as possible in accordance with its position in the sequence in the compartments (s) of the holding device (H), characterized in that a) a first wafer (W1) is removed from a first compartment (s2) of the holding device (H), b) the information carrier of the first wafer (W1) is read by a reading device (A) to determine the position of the first wafer (W1) in the sequence, c) subsequently, a second wafer (W2) is removed from a second compartment (s1) which corresponds to the position of the first wafer (W1) in the sequence, d) the first wafer (W1) is moved into the compartment (s1) which corresponds to its position in the sequence. The device according to the invention serves for carrying out the method according to the invention.
A method for sorting wafers (W) of a chip production operation from an initial state into an end state, the wafers being at least partly identifiable on the basis of an information carrier as elements of a finite sequence, in the initial state the wafers being arranged in any desired sequence in compartments (s) of a holding device and in the end state each wafer being arranged as far as possible in accordance with a prescribed sequence in the compartments (s) of the holding device, characterized in that
The method as claimed in at least one of the preceding claims, characterized in that a wafer (W) which has a non-readable information carrier, in particular a non-readable barcode, in the end state is arranged in a compartment (s) of the holding device (H) which is not occupied by a wafer (W) with a readable information carrier.
The method as claimed in at least one of the preceding claims, characterized in that a compartment (s) in which a wafer (W) with a non-readable information carrier is arranged is automatically provided with a marking.
The method as claimed in at least one of the preceding claims, characterized in that each wafer (W) which has a non-readable information carrier is provided with a flag (NR) for non-readability by a program on a data processing device.
Dependencies are inferred from the claim text.