Integrated circuit devices with high and low voltage components and processes for manufacturing these devices
AssigneeKoninklijke Philips Electronics N.V.
InventorsXi-Wei Lin, Gwo-Chung Tai
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AssigneeKoninklijke Philips Electronics N.V.
InventorsXi-Wei Lin, Gwo-Chung Tai
Estimating the term…
The present invention includes a technique for making a dual voltage integrated circuit device. A gate dielectric layer is formed on a semiconductor substrate and a gate material layer is formed on the dielectric layer. A first region of the gate material layer is doped to a first nonzero level and a second region of the gate material level is doped to a second nonzero level greater than the first level. A first field effect transistor is defined that has a first gate formed from the first region. Also, a second field effect transistor is defined that has a second gate formed from the second region. The first transistor is operable at a gate threshold voltage greater than the second transistor in accordance with a difference between the first level and the second level.
A method of making an integrated circuit device, comprising:
A method of manufacturing an integrated circuit device, comprising:
A method of making an integrated circuit device, comprising:
An integrated circuit device comprising a plurality of components formed along a substrate, said components including:
Dependencies are inferred from the claim text.