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US 2002/0160314 A1Published application
Method of improving astigmatism of a photoresist layer
AssigneeMacronix International Co., Ltd.
InventorsShun-Li Lin, Wei-Hua Hsu
Life of this patent
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Abstract
A photoresist layer comprising an optically active component is provided, so that after an incident linearly polarized light penetrates the photoresist layer, the intensity ratio of an S wave polarization and a P wave polarization divided from the linearly polarized light is effectively 1:1 so improving astigmatism.
Claims18
A method of improving astigmatism of a photoresist layer, the method comprising:
- providing an exposure system comprising a light source to provide light;
- providing a mask comprising a mask pattern, the light capable of passing through the mask pattern;
- providing a photoresist layer comprising an optically active component;
- providing a reduction lens system adapted to accept light passing through the mask to form an image in the photoresist layer;
- and
- providing a linear polarizer positioned between the light source and the photoresist layer to linearly polarize the light from the light source;
- wherein the optically active component divides linearly polarized light into an intensity-adjusted S wave polarization and an intensity-adjusted P wave polarization, the proportion of the intensity of the S wave polarization to the P wave polarization being effectively 1:1 after penetrating the photoresist layer to a predetermined depth.
4 more elements
A method of improving astigmatism of a photoresist layer, the method comprising:
- providing an exposure system comprising a light source to provide light;
- providing a mask comprising a mask pattern, the light capable of passing through the mask pattern;
- providing a reduction lens system adapted to accept light passing through the mask to form an image in the photoresist layer;
- providing a linear polarizer positioned between the light source and the photoresist layer to linearly polarize the light from the light source;
- and
- providing a transparent container loaded with a reagent comprising an optically active component positioned between the linear polarizer and the photoresist layer, the optically active component adapted to divide linearly polarized light into an intensity-adjusted S wave polarization and an intensity-adjusted P wave polarization, the proportion of the intensity of the S wave polarization to the P wave polarization being effectively 1:1 after penetrating the photoresist layer to a predetermined depth.
3 more elements
Dependencies are inferred from the claim text.