US 2002/0154279 A1 · Lithographic projection apparatus, device manufacturing method, and device manufactured thereby

Abstract

Contaminant particles travelling with a projection beam in a lithographic projection apparatus are ionized. A purge gas may be attracted towards getter plates provided upstream of the purge gas supply. A magnetic field traps electrons generated by the ionizer to improve the ionization of the purge gas. The contaminant particles can be ionized by generating a plasma in a tube having a greater length than width.

Claims20

Dependent claims

A lithographic projection apparatus for imaging a mask pattern in a mask onto a substrate, the apparatus comprising:

an illumination system constructed and arranged to supply a projection beam of radiation;
a first object table constructed to hold a mask;
a second object table constructed to hold a substrate;
a projection system constructed and arranged to image an irradiated portion of the mask onto a target portion of the substrate;
and
a contaminant barrier comprising an ionizer which is constructed and arranged to ionize a gas provided in a region traversed by said projection beam.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

10/036,497Filed 7 Jan 2002

Priority

EP 01300167.210 Jan 2001

Published

24 Oct 2002

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

G03F 7/70908
Construction of apparatus, e.g. environment aspects, hygiene aspects or materials: hygiene, e.g. preventing apparatus pollution, mitigating effect…
G03F 7/70916
Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus: pollution mitigation, i.e.…
G03F 7/70933
Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus: purge, e.g. exchanging fluid…
G03F
Photomechanical production of textured or patterned surfaces

Lithographic projection apparatus, device manufacturing method, and device manufactured thereby

Life of this patent

Lithographic projection apparatus, device manufacturing method, and device manufactured thereby

Life of this patent

Abstract

Claims20