Transferring apparatus and substrate processing apparatus

A substrate processing apparatus comprising:

• a transferring apparatus including:
• at least two substrate holders with mutual interference potential, at least one substrate holder being driven by a motor;
• and a detection unit for detecting a position of the at least one substrate holder;
• wherein the detection unit includes:
• an absolute encoder directly connected to the motor thereby to detect a revolution amount of a rotating shaft of the motor and further output a detection signal;
• a driver which receives the detection signal outputted from the absolute encoder thereby to output a positional information;
• and a controller which receives the positional information outputted from the driver thereby to judge the position of the substrate holder;
• wherein the controller controls in a manner that the substrate holders do not interfere with each other;
• and
• a processing bath for processing a substrate;
• wherein the substrate holder is movable to accommodate the substrate in the processing bath.

A substrate processing apparatus comprising:

• a transferring apparatus including:
• at least one first substrate holder and at least one second substrate holder with mutual interference potential, the at least one first substrate holder being driven by a motor;
• and a detection unit for detecting a position of the at least one first substrate holder;
• wherein the detection unit includes:
• an absolute encoder directly connected to the motor thereby to detect a revolution amount of a rotating shaft of the motor and further output a detection signal;
• a driver which receives the detection signal outputted from the absolute encoder thereby to output a positional information;
• and a controller which receives the positional information outputted from the driver thereby to judge the position of the first substrate holder;
• wherein the controller controls in a manner that the substrate holders do not interfere with each other;
• and
• a processing bath for processing a substrate;
• wherein the first substrate holder is movable to accommodate the substrate in the processing bath, while the second substrate holder transfers the substrate thereby to give and receive the substrate to and from the first substrate holder;
• and
• the second substrate holder is provided with drive means for moving the second substrate holder and the controller controls the drive means and the motor.

A substrate processing apparatus comprising:

• a plurality of processing baths arranged in a horizontal direction to process a substrate therein;
• a plurality of first substrate holders provided for the plurality of processing baths respectively, the first substrate holders each moving between a position inside the corresponding processing bath and another position above the corresponding processing bath, in a vertical direction;
• a plurality of vertical movement units for moving the plurality of first substrate holders in the vertical direction;
• a second substrate holder which holds the substrate and moves to the horizontal direction above the plurality of processing baths;
• a horizontal movement unit for moving the second substrate holder in the horizontal direction;
• and
• a control unit which drives the vertical movement units and the horizontal movement unit so that the first substrate holders and the second substrate holder do not interfere with each other, thereby to move the first substrate holders and the second substrate holder.

A transferring apparatus comprising:

• a moving body driven by a motor;
• an absolute encoder directly connected to the motor;
• and
• a controller for detecting a position of the moving body on a basis of a signal outputted from the absolute encoder.