Linear motor and stage apparatus, exposure apparatus, and device manufacturing method using the same

A stage apparatus comprising:

• a linear motor including first magnets arrayed such that polarization directions thereof are periodically opposite, second magnets arrayed adjacent to said first magnets such that polarization directions thereof are periodically opposite, and an electromagnetic coil opposing said first and second magnets to generate the Lorentz force by at least said first and second magnets, said second magnets being disposed such that the polarization directions thereof intersect those of said first magnets;
• and
• a stage driven by said linear motor,
• said electromagnetic coil being energized to move said electromagnetic coil and said first and second magnets relative to each other, thereby driving said stage.

An exposure apparatus comprising:

• a linear motor including first magnets arrayed such that polarization directions thereof are periodically opposite, second magnets arrayed adjacent to said first magnets such that polarization directions thereof are periodically opposite, and an electromagnetic coil opposing said first and second magnets to generate the Lorentz force by at least said first and second magnets, said second magnets being disposed such that the polarization directions thereof intersect those of said first magnets;
• and
• a stage driven by said linear motor,
• said electromagnetic coil being energized to move said electromagnetic coil and said first and second magnets relative to each other, thereby positioning either one or both of a substrate and a master with a stage apparatus comprising a linear motor.