X-ray exposure apparatus

A method of manufacturing devices, comprising steps of:

• placing a plurality of items of semiconductor manufacturing equipment, inclusive of an X-ray exposure apparatus, in a plant;
• and
• manufacturing a semiconductor device using said plurality of items of semiconductor manufacturing equipment;
• said X-ray exposure apparatus having:
• a plasma X-ray source for generating X-rays;
• a collimator for reducing a global divergence angle of X-rays that diverge from said X-ray source, and irradiating a reticle with the X-rays;
• and
• a moving mechanism for moving said collimator.

A semiconductor manufacturing plant, comprising:

• a plurality of items of semiconductor manufacturing equipment inclusive of an X-ray exposure apparatus;
• a local-area network for interconnecting said plurality of items of manufacturing equipment;
• and
• a gateway for connecting said local-area network and an external network outside said semiconductor manufacturing plant;
• wherein said X-ray exposure apparatus has:
• a plasma X-ray source for generating X-rays;
• a collimator for reducing a global divergence angle of X-rays that diverge from said X-ray source, and irradiating a reticle with the X-rays;
• and
• a moving mechanism for moving said collimator.

A method of maintaining an X-ray exposure apparatus, comprising the steps of:

• preparing a database, which stores information relating to maintenance of said X-ray exposure apparatus, on an external network outside a plant at which said X-ray exposure apparatus has been installed;
• connecting said X-ray exposure apparatus to a local-area network inside said plant;
• and
• maintaining said X-ray exposure apparatus, based upon information that has been stored in said database, utilizing said external network and said local-area network;
• wherein said X-ray exposure apparatus has:
• a plasma X-ray source for generating X-rays;
• a collimator for reducing a global divergence angle of X-rays that diverge from said X-ray source, and irradiating a reticle with the X-rays;
• and
• a moving mechanism for moving said collimator.