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AssigneeSumitomo Special Metals Co., Ltd.
InventorsTakeshi Nishiuchi, Ikuo Shimamoto, Fumiaki Kikui, Yoshimi Tochishita, Kazumitsu Sato
Estimating the term…
With the deposited-film forming apparatus according to the first embodiment of the present invention, the distance between the tubular barrel and the evaporating section can be varied, unlike the prior art deposited-film forming apparatus and hence, the efficient formation of the deposited film on the surface of each of the work pieces accommodated in the tubular barrel and the inhibition of the softening of the formed film can be achieved simultaneously. Therefore, it is possible to inhibit the damaging of the deposited film formed on the surface of each of the work pieces and the production of projections on the deposited film, and to form a deposited film at a high quality in respect of a corrosion resistance and the like and at low cost. With the deposited-film forming apparatus according to the second embodiment of the present invention, the distance between the accommodating section defined in the tubular barrel and the evaporating section can be varied and hence, this deposited-film forming apparatus also exhibits an effect similar to that in the deposited-film forming apparatus according to the first embodiment of the present invention.
A deposited-film forming apparatus comprising an evaporating section for a depositing material, and a tubular barrel formed of a mesh net for accommodation of work pieces, on each of the surfaces of which a depositing material is to be deposited, said evaporating section and said tubular barrel being mounted in a vacuum-treating chamber, wherein said tubular barrel is supported circumferentially outside a horizontal rotational axis of a support member rotatable about said rotational axis, for rotation about said rotational axis, so that the distance between said tubular barrel rotated about said rotational axis of said support member and said evaporating section can be varied by rotating said support member.
A deposited-film forming apparatus comprising an evaporating section for a depositing material, and a tubular barrel rotatable about a horizontal rotational axis and formed of a mesh net for accommodation of work pieces, on each of the surfaces of which a depositing material is to be deposited, said evaporating section and said tubular barrel being mounted in a vacuum-treating chamber, wherein the inside of said tubular barrel is divided into two or more accommodating sections, said accommodating sections being defined, so that the distance between said accommodating section and said evaporating section can be varied by rotating said tubular barrel.
Dependencies are inferred from the claim text.