Semiconductor device having a thin film field-effect transistor, liquid crystal display device, and production method thereof
AssigneesRenesas Technology Corp., Seiko Epson Corporation
InventorsMasami Hayashi, Masanao Kobayashi
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Abstract
A highly reliable semiconductor device is provided. The semiconductor device is provided with a thin film field-effect transistor having a channel region and includes a substrate and a semiconductor film. The semiconductor film is formed on the substrate and includes the channel region of the thin film field-effect transistor. An upper surface of the semiconductor film is planarized by removing a surface layer of the semiconductor film.
Claims20
A semiconductor device having a thin film field-effect transistor including a channel region, comprising:
- a substrate;
- and
- a semiconductor film formed on said substrate and including said channel region of said thin film field-effect transistor, wherein
- said semiconductor film has an upper surface that is planarized by removal of a surface layer of said semiconductor film.
A method of producing a semiconductor device having a thin film field-effect transistor including a channel region, comprising the steps of:
- forming an amorphous semiconductor film on a substrate;
- subjecting said amorphous semiconductor film to a heat treatment to form a crystalline semiconductor film including a region that is to become said channel region;
- and
- removing a surface layer of said crystalline semiconductor film.
A method of producing a semiconductor device having a thin film field-effect transistor including a channel region, comprising the steps of:
- forming an amorphous semiconductor film on a substrate;
- forming an impurity absorption film on said amorphous semiconductor film;
- forming a crystalline semiconductor film including a region that is to become said channel region by subjecting said amorphous semiconductor film with said impurity absorption film formed thereon to heat treatment;
- and
- removing said impurity absorption film.
Dependencies are inferred from the claim text.