Ferroelectric random access memory device and method for manufacture thereof

Abstract

A method for manufacturing a phase shift mask includes the steps of forming a shift layer, a metal layer and a photoresist layer on a substrate subsequently, patterning the photoresist layer into a predetermined configuration, thereby obtaining a first, a second, a third and a fourth photoresist patterns, forming a chemical swelling process (CSP) chemical layer on the photoresist patterns and an exposed portion of the substrate, patterning the CSP chemical layer using masks over the first and the fourth photoresist patterns, whereby the CSP chemical layer on the first and the fourth photoresist patterns remains thereon, patterning an exposed portion of the metal layer into the predetermined configuration using the second and the third photoresist patterns as masks, patterning the exposed portions of the shift layer into the predetermined configuration, and removing the first and fourth photoresist patterns.

Dependencies are inferred from the claim text.