Method of and apparatus for cutting off fuse electrode, integrated circuit device, and method of manufacturing same
AssigneeNEC Electronics Corporation
InventorTomoki Hirota
Life of this patent
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Abstract
Adjacent ones of a plurality of fuse electrodes extending parallel to each other are cut off by a laser beam. Cutting positions on the adjacent fuse electrodes are set to positions which are different from each other in a direction in which the fuse electrodes extend. Since the cutting positions on the adjacent fuse electrodes are different from each other, the adjacent fuse electrodes are prevented from being short-circuited by fragments of components thereof that are scattered when the laser beam is applied to cut off the fuse electrodes.
Claims10
A method of cutting off a fuse electrode among a plurality of fuse electrodes extending parallel to each other, comprising the steps of:
- setting cutting positions on adjacent fuse electrodes to positions which are different from each other in a direction in which the fuse electrodes extend;
- and
- applying a laser beam to each of said cutting positions to cut off each of said adjacent fuse electrodes.
A method of cutting off a fuse electrode among a plurality of fuse electrodes extending parallel to each other and including adjacent fuse electrodes disposed in respective layers which are different from each other, comprising the steps of:
- focusing a laser beam onto a fuse electrode in one of the layers to be cut off;
- and
- cutting off only said fuse electrode onto which said laser beam is focused, with the laser beam at a predetermined position thereon.
An apparatus for cutting off a fuse electrode among a plurality of fuse electrodes extending parallel to each other and disposed in an integrated circuit device, comprising:
- a holding stage for holding said integrated circuit device in a predetermined position;
- a laser unit for applying a laser beam to cut off the fuse electrode to said integrated circuit device held by said holding stage;
- a slide unit for moving said holding stage in a predetermined direction;
- and
- an operation controller for setting cutting positions on adjacent fuse electrodes to positions which are different from each other in a direction in which the fuse electrodes extend, and controlling said laser unit and said slide unit to apply a laser beam to each of said cutting positions.
An apparatus for cutting off a fuse electrode among a plurality of fuse electrodes extending parallel to each other and disposed in an integrated circuit device, said fuse electrodes including adjacent fuse electrodes disposed in respective layers which are different from each other, comprising:
- a holding stage for holding said integrated circuit device in a predetermined position;
- a laser unit for applying a laser beam to cut off the fuse electrode to said integrated circuit device held by said holding stage;
- a slide unit for moving said holding stage in a predetermined direction;
- and
- an operation controller for controlling said laser unit and said slide unit to apply a laser beam to the fuse electrode, and controlling said laser unit to focus the laser beam onto only the fuse electrode to be cut off.
An integrated circuit device comprising:
- a plurality of fuse electrodes extending parallel to each other;
- and
- a plurality of windows associated respectively with said fuse electrodes, said windows including windows associated respectively with adjacent ones of said fuse electrodes and disposed in respective positions which are different from each other in a direction in which the fuse electrodes extend, said windows being defined by an insulating film having a thickness which allows a laser beam to pass therethrough to cut off the fuse electrodes.
An integrated circuit device comprising:
- a plurality of fuse electrodes extending parallel to each other and including adjacent fuse electrodes disposed in respective layers which are different from each other;
- and
- a cover layer disposed on said fuse electrodes and comprising an insulating film having a thickness which allows a laser beam to pass therethrough to cut off the fuse electrodes.
A method of manufacturing an integrated circuit device having a plurality of fuse electrodes extending parallel to each other, a plurality of windows associated respectively with said fuse electrodes, said windows including windows associated respectively with adjacent ones of said fuse electrodes and disposed in respective positions which are different from each other in a direction in which the fuse electrodes extend, said windows being defined by an insulating film having a thickness which allows a laser beam to pass therethrough to cut off the fuse electrodes, and a logic circuit having a wiring pattern, said method comprising the steps of:
- fabricating said fuse electrodes together with the wiring pattern of said logic circuit;
- growing an insulating layer on said fuse electrodes and said wiring pattern;
- and
- defining a contact hole and said windows in said insulating layer, said contact hole reaching said wiring pattern.
A method of manufacturing an integrated circuit device comprising a plurality of fuse electrodes extending parallel to each other and including adjacent fuse electrodes disposed in respective layers which are different from each other, a cover layer disposed on said fuse electrodes and comprising an insulating film having a thickness which allows a laser beam to pass therethrough to cut off the fuse electrodes, and a logic circuit having a plurality of wiring patterns disposed in respective layers, said method comprising the steps of:
- fabricating said wiring pattern and said fuse electrodes together in each of said layers;
- defining a contact hole reaching the wiring pattern in one of said layers, and removing the insulating film over the fuse electrodes in the same layer as said one of the layers while leaving predetermined thickness thereof;
- and
- depositing a cover layer having a predetermined thickness over the fuse electrodes in each of the layers.
Dependencies are inferred from the claim text.