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US 2001/0023951 A1Published application
Method of manufacturing a ferroelectric capacitor
OwnerJune-key Lee, Bon-jae Kooinventors
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Abstract
A method of manufacturing a ferroelectric capacitor includes the steps of forming a lower electrode on a substrate, forming a ferroelectric layer on the lower electrode, forming an upper electrode on the ferroelectric layer, forming a wiring layer on the upper electrode, and applying a voltage to an electrode selected from the upper electrode and the lower electrode, the voltage being greater than the operational voltage of the electrode, to regularly align an electric dipole of the ferroelectric layer.
Claims14
A method of manufacturing a ferroelectric capacitor, the method comprising the steps of:
- forming a lower electrode on a substrate;
- forming a ferroelectric layer on the lower electrode;
- forming an upper electrode on the ferroelectric layer;
- forming a wiring layer on the upper electrode;
- and
- applying a voltage to an electrode selected from the upper electrode and the lower electrode, the voltage being greater than the operational voltage of the electrode, to regularly align an electric dipole of the ferroelectric layer.
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Dependencies are inferred from the claim text.