Metal compound solution and thin film formation using the same

A metal compound solution comprising a metal compound represented by formula (I):

• 7
• wherein R1, R2, and R3 each represent a halogen-substituted or unsubstituted alkyl group having 1 to 8 carbon atoms which may contain an oxygen atom in its carbon chain;
• R4 represents a straight-chain or branched alkylene group having 2 to 18 carbon atoms;
• M represents a lead atom, a titanium atom or a zirconium atom;
• when M is a lead atom, 1, m and n represent 0, 2 and 0, respectively;
• when M is a titanium atom or a zirconium atom, n represents 0 or 1, and 1 and m each represent an integer of 0 to 4 satisfying equation:
• 1+m+2n=4,
• said metal compound being dissolved in a cyclohexane compound represented by formula (II):
• 8
• wherein R5 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms;
• and p represents 1 or 2.