Back to results
US 2001/0019413 A1Published application
Pattern reading apparatus
AssigneeAsahi Kogaku Kogyo Kabushiki Kaisha
InventorsTuyoshi Ishikawa, Kenichiro Otsuka, Hiroaki Ando
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeAsahi Kogaku Kogyo Kabushiki Kaisha
InventorsTuyoshi Ishikawa, Kenichiro Otsuka, Hiroaki Ando
Estimating the term…
A pattern reading apparatus for reading a pattern from an object. The pattern reading apparatus includes a minute-area light source, an objective lens system, an imaging lens, and an imaging element. The objective lens system causes an illumination light beam from the light source to be incident on the object and converges the light beam reflected from the object. The imaging lens forms an image of the object using only a scattered component of light which has been reflected from the object. The imaging element is disposed at a position where the image of the pattern is imaged for reading the pattern.
A pattern reading apparatus for causing a light beam emitted from a light source to be incident on an object surface having a pattern formed thereon as an object to be read through an objective lens, for converging the light beam reflected at the object surface through the objective lens, and for reading the image of the pattern by forming the image by an imaging lens, the pattern reading apparatus comprising a tilt mechanism for supporting said objective lens such that said objective lens is rotatable about a rotation axis which is perpendicular to an optical axis of the objective lens.
A pattern reading apparatus, comprising:
A pattern reading apparatus for causing an illumination light beam emitted from a minute-area light source to be incident on an object surface having a pattern formed thereon as an object to be read through a first lens, converging a light beam having the information of the pattern by a second lens, causing the converged light beam to be incident on an imaging lens, forming the image of the pattern by the imaging lens and reading the thus formed image, the pattern reading apparatus comprising a tilt mechanism for supporting the second lens so as to turn about a turning axis which is perpendicular to the optical axis of the second lens.
Dependencies are inferred from the claim text.