Method and apparatus for inspecting wafers

A cluster tool for handling a semiconductor wafer comprising:

• a housing;
• a mechanism within said housing for moving semiconductor wafers;
• an inspection chamber coupled to the housing;
• and
• an inspection station disposed in the inspection chamber for detecting defects in the semiconductor wafer.

A semiconductor wafer inspection station comprising:

• a cluster tool for manipulating the semiconductor wafer;
• a light source coupled to the cluster tool;
• an image detector coupled to the cluster tool;
• and
• a processor coupled to the image detector for processing an image detected by the image detector to detect defects in the semiconductor wafer.

An inspection station for detecting large scale defects in a semiconductor wafer comprising:

• a light source for providing a light beam;
• a transport device for moving the semiconductor wafer to a location where it receives the light beam;
• and
• a receiver for receiving light reflected from the semiconductor wafer when positioned at said location,
• the light source, transport device, and receiver being located at a cluster tool.

A method of processing a semiconductor wafer comprising the steps of:

• providing a cluster tool;
• providing a process chamber coupled to the cluster tool;
• providing an inspection station coupled to the cluster tool;
• transporting the semiconductor wafer from the process chamber to the inspection station.