The process of coating super-fine particles of multi-element thin film

Abstract

This invention provides a process for coating super fine ion particles of multiple elements on the surface of a micro router substrate, characteristics of which is that the coating step is operated under low temperatures and vacuums. First, raw micro routers are cleaned by electron beams under atmospheric pressures and room temperatures, then the raw micro routers are transferred into a vacuum environment, and increase the temperature of the environment. Next, the surface of the micro router is cleaned by ions, then proceed with the coating process. An arc source is used to bombard cations from a target, while a filtration net is used to get filtrate of small cation particles. Then, an ion assistant device is operated to further fine the filtrated particles, therefore only super fine ion particles are coated on the surface of the micro router substrates. The coated substance is super fine particle and has good adhesion to the micro router substrate, therefore cutting speed and wear-resistance of the coated micro router has increased, the cutting precision, and the life has also improved. This invention has short process time and successfully coats a thin film with good adhesion to a micro router substrate which can not be easily achieved by conventional technologies.

Dependencies are inferred from the claim text.