Field-effect transistor and manufacture thereof
AssigneeSecretary of Agency of Industrial Science and Tech
InventorTatsuro Maeda
Life of this patent
Estimating the term…
Loading patent…
AssigneeSecretary of Agency of Industrial Science and Tech
InventorTatsuro Maeda
Estimating the term…
A source and a drain of a field-effect transistor are formed so as to fulfill a specified physical relationship to upper and lower gates thereof and thereby parasitic capacitance that hampers its high-speed operation is minimized. The filed-effect transistor includes a second support substrate, a lower gate that is embedded in an insulator formed on the second support substrate, an insulating layer formed on the lower gate, a semiconductor layer formed on the insulating layer, an insulating layer formed on the semiconductor layer, an upper gate formed on the insulating layer, as well as a source electrode, a drain electrode, an upper gate electrode, and a lower gate electrode all of which are isolated from one another by the insulating layer.
A double-gate field-effect transistor having a structure that comprises:
A method for manufacturing a double-gate field-effect transistor comprising the steps of:
Dependencies are inferred from the claim text.