Electrostatic chuck and manufacturing method thereof

A manufacturing method of an electrostatic chuck, comprising:

• a substrate preparation step of preparing a substrate comprising a first surface having electrical insulation properties and a second surface opposite to the first surface and having a through hole formed therein that penetrates the first surface and the second surface;
• a bush insertion step of inserting a bush which is a bottomed cylindrical body comprising a side wall, an opening formed at one end of the side wall, and a bottom plate provided at the other end of the side wall, and is configured so that a temperature sensor for measuring a temperature of the bottom plate is capable of being attached thereto into the through hole so that the opening is located on a side near the second surface and the bottom plate is located on a side near the first surface;
• an attraction electrode forming step of forming an attraction electrode made of an electric conductor on the first surface;
• a dielectric layer forming step of forming a dielectric layer made of a dielectric configured to be capable of attracting a workpiece so as to cover the attraction electrode and the bush;
• and
• a temperature adjuster installation step of installing a temperature adjuster configured to be capable of adjusting a temperature of the workpiece.