Liquid transfer device for forming liquid film on a surface of a transfer table

A liquid transfer device comprising:

• a transfer table configured to have a bottom surface on which a liquid film is formed, and transfer a liquid to a transfer target by immersing the transfer target in the liquid film;
• a squeegee disposed above the transfer table and configured to push and spread the liquid on the transfer table by relatively moving along the bottom surface of the transfer table to form the liquid film;
• and
• a squeegee holding mechanism configured to hold the squeegee to be movable in a vertical direction, wherein
• the bottom surface of the transfer table includes a first bottom surface portion located at a first height and a second bottom surface portion located at a second height lower than the first height,
• the second bottom surface portion defines a location to transfer the liquid to the transfer target and a film thickness of the liquid,
• the squeegee has a side surface on a traveling direction side in contact with the liquid when the squeegee relatively moves along the bottom surface of the transfer table,
• the side surface of the squeegee has an upward inclination or is perpendicular to the bottom surface of the transfer table, and
• the squeegee holding mechanism moves the squeegee in the vertical direction to abut the first bottom surface portion and then the squeegee is moved over the second bottom surface portion.