Planarization system, planarizing method, and method of manufacturing an article

A planarizing method, comprising:

• dispensing formable material onto a substrate;
• positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck,
• contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate;
• curing the film of formable material to form a cured layer between the superstrate and the substrate;
• and
• initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism,
• wherein the engagement mechanism comprises a body, and
• wherein each of the first protrusion and the second protrusion extends from the body.

A method of manufacturing an article, comprising:

• dispensing a formable material on a substrate;
• positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck;
• contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate;
• curing the film of formable material to form a cured layer between the superstrate and the substrate;
• and
• initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism;
• fully separating the superstrate from the cured layer;
• and
• processing the cured formable material to make the article,
• wherein the substrate has an outer edge portion defining a notch, and
• wherein the size and shape of the first protrusion is selected to engage within the notch.

A method of manufacturing an article, comprising:

• dispensing a formable material on a substrate;
• positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck;
• contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate;
• curing the film of formable material to form a cured layer between the superstrate and the substrate;
• and
• initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism;
• fully separating the superstrate from the cured layer;
• and
• processing the cured formable material to make the article,
• wherein the engagement mechanism comprises a body, and
• wherein each of the first protrusion and a second protrusion extends from the body.