Polymer, photoresist compositions including the same, and pattern formation methods

A polymer, comprising:

• a first repeating unit comprising an acid labile group;
• an anionic endgroup selected from a carboxylate group or a sulfamate group;
• and
• an organic cation,
• wherein the polymer is a polymerization product of a monomer comprising the acid labile group in the presence of a compound of Formulae (10a), (10b), or (10c):
• wherein, in Formulae (10a) to (10c),
• R14 and R19 are each independently substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• R15 to R18 are each independently hydrogen, halogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• R20 and R21 are each independently substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• L12 is a divalent linking group;
• L13 is a single bond or a divalent linking group;
• L14 is a divalent linking group;
• each A− is a carboxylate group or a sulfamate group;
• and
• each M+ is an organic cation.

A polymer, comprising:

• a first repeating unit comprising an acid labile group;
• an anionic endgroup selected from a carboxylate group, a sulfonate group, or a sulfamate group;
• and
• an organic cation,
• wherein the polymer is a polymerization product of a monomer comprising the acid labile group in the presence of a compound represented by at least one of Formulae (9c), (10c), or (10d):
• wherein, in Formulae (9c), (10c), and (10d),
• R22 and R23 are each independently hydrogen, halogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C3-30 cycloalkenyl, substituted or unsubstituted C3-30 heterocycloalkenyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• provided that at least one of R22 and R23 is not hydrogen;
• R22 and R23 are optionally bonded together to form a ring;
• R24 and R25 are each independently substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• R26 to R29 are each independently hydrogen, halogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C3-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C2-30 heteroaryl, substituted or unsubstituted C3-30 heteroarylalkyl, or substituted or unsubstituted C3-30 alkylheteroaryl;
• X is chlorine, bromine, iodine, or cyano;
• L15 and L16 are each independently a divalent linking group;
• L17 is a single bond or a divalent linking group;
• each A− is a carboxylate group, a sulfamate group, or a sulfonate group;
• and
• each M+ is an organic cation.