Liquid processing apparatus

A liquid processing apparatus that applies a coating liquid onto a substrate, comprising:

• a substrate holder configured to hold and rotate the substrate;
• a coating liquid supplier configured to supply the coating liquid to the substrate held by the substrate holder;
• a cup provided to surround the substrate held by the substrate holder;
• and
• a solvent supplier configured to supply a solvent for the coating liquid to a coating liquid collector,
• wherein the cup includes:
• an outer cup arranged outside the substrate holder;
• an inner cup arranged on an inner peripheral side of the outer cup below the substrate holder and having a downwardly-extending wall;
• an exhaust path provided between the outer cup and the inner cup;
• and
• the coating liquid collector provided with a plurality of openings through which an exhaust flow passes, the coating liquid collector extending downward below the downwardly-extending wall of the inner cup with a gap between the coating liquid collector and a lower end of the downwardly-extending wall.