Back to results
US 12,740,142 B2Granted
Apparatus and test element group
AssigneeMicron Technology, Inc.
InventorsAkiyoshi Seko, Yu Kosuge, Takahiro Sonoda, Kazuo Aizawa, Koji Hamada
Life of this patent
Estimating the term…
Abstract
According to one or more embodiments of the disclosure, an apparatus comprising a pad above a semiconductor substrate, an n-well in the semiconductor substrate, and a floating p-well in the semiconductor substrate is provided. The floating p-well is below the pad and surrounded by the n-well in the semiconductor substrate.
Claims20
An apparatus, comprising:
- a pad above a semiconductor substrate;
- an n-well in the semiconductor substrate;
- and
- a floating p-well in the semiconductor substrate, the floating p-well below the pad and surrounded by the n-well in the semiconductor substrate.
1 more element
An apparatus, comprising:
- a pad above a semiconductor substrate, the pad configured to be electrically probed during testing;
- an n-well in the semiconductor substrate;
- a deep n-well in the semiconductor substrate, the deep n-well under the n-well;
- and
- a floating p-well in the semiconductor substrate, the floating p-well below the pad and surrounded by the n-well and the deep n-well in the semiconductor substrate.
2 more elements
A test element group in a scribe region on a semiconductor substrate, comprising:
- a pad above the semiconductor substrate in the scribe region, the pad coupled to a capacitance element;
- an n-well in the semiconductor substrate in the scribe region;
- and
- a floating p-well in the semiconductor substrate in the scribe region, the floating p-well below the pad and surrounded by the n-well in the semiconductor substrate.
1 more element
Dependencies are inferred from the claim text.