Reticle loading system and method using the same

A method for loading reticle, comprising:

• providing a first port to transfer a reticle transport pod from an outer environment to a loading environment, the reticle transport pod containing a reticle therein;
• providing a second port to transfer a reticle storage pod from a storage environment to the loading environment;
• providing a first lifting means within the loading environment to cooperate with the first port to send the reticle transport pod from a top position to a bottom position, and the reticle transport pod presented in an open status to expose a storage space of the reticle transport pod with the reticle when the reticle transport pod arrives at the bottom position;
• providing a second lifting means within the loading environment to cooperate with the second port to send the reticle storage pod from a top position to a bottom position, and the reticle storage pod presented in an open status to expose a storage space of the reticle storage pod when the reticle storage pod arrives at the bottom position;
• and
• transferring, by a clamp mechanism operable in the loading environment, the exposed reticle from the reticle transport pod in the open status to the exposed storage space of the reticle storage pod in the open status.

A method for unloading reticle, comprising:

• providing a first port to transfer a reticle transport pod from an outer environment to a loading environment;
• providing a second port to transfer a reticle storage pod from a storage environment to the loading environment, the reticle storage pod containing a reticle therein;
• providing a first lifting means within the loading environment to cooperate with the first port to send the reticle transport pod from a top position to a bottom position, and the reticle transport pod presented in an open status to expose a storage space of the reticle transport pod when the reticle transport pod arrives at the bottom position;
• providing a second lifting means within the loading environment to cooperate with the second port to send the reticle storage pod from a top position to a bottom position, and the reticle storage pod presented in an open status to expose a storage space of the reticle storage pod with the reticle when the reticle storage pod arrives at the bottom position;
• and
• transferring, by a clamp mechanism operable in the loading environment, the exposed reticle from the reticle storage pod in the open status to the exposed storage space of the reticle transport pod in the open status.