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US 12,601,050 B2Granted
Surface modified substrates and related methods
AssigneeEntegris, Inc.
InventorsCarlo Waldfried, Surendra Maharjan, Stephen Longo
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Abstract
Surface modified substrates and related methods are provided. A substrate having a modified surface comprises a first region and a second region. The first region is located above the second region. The first region comprises a nickel fluoride. The second region comprises a nickel alloy. A concentration of the nickel fluoride gradually decreases from the first region to the second region.
Claims20
A substrate comprising:
- a modified surface having a first region comprising a nickel fluoride and
- a second region comprising a nickel alloy,
- wherein the first region is above the second region and
- wherein a concentration of the nickel fluoride decreases from the first region to the second region within the modified surface of the substrate.
1 more element
A method comprising:
- exposing a substrate to a fluorine-containing vapor sufficient to chemically modify a surface of the substrate to form a modified surface having
- a first region comprising a nickel fluoride and
- a second region comprising a nickel alloy,
- wherein the first region is above the second region and
- wherein a concentration of the nickel fluoride decreases from the first region to the second region within the substrate.
2 more elements
Dependencies are inferred from the claim text.