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US 12,601,043 B2Granted
Mask device and evaporation device
AssigneesWuhan Tianma Micro-Electronics Co., Ltd., Wuhan Tianma Micro-Electronics Co., Ltd. Shanghai Branch
InventorsNaichao Mu, Yuan Li, Yu Xin, Jun Ma, Lijing Han
Life of this patent
Estimating the term…
Abstract
A mask module includes a framework and a first strip plate fixed on the framework and extending along a first direction. The first strip plate is provided with a first concave-convex structure on one side edge along the first direction. At least one convex structure is provided in a middle of the first concave-convex structure along the first direction. The convex structure and the first stripe plate are integrally formed.
Claims20
A mask module, comprising:
- a framework;
- and
- at least one first strip plate fixed on the framework and extending along a first direction, wherein:
- the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction;
- at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction;
- and
- the at least one raised structure and the at least one first strip plate are integrally formed.
4 more elements
An evaporation device, comprising
- an evaporation source;
- and
- a mask module including:
- a framework;
- and
- at least one first strip plate fixed on the framework and extending along a first direction;
- wherein:
- the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction;
- at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction;
- the at least one raised structure and the at least one first strip plate are integrally formed;
- and
- the evaporation source sends evaporation substances towards the mask module, and the evaporation substances are evaporated to evaporation targets through the mask module.
9 more elements
A mask module, comprising:
- a framework;
- and
- at least one first strip plate fixed on the framework and extending along a first direction, wherein:
- the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction;
- at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction;
- and
- a width of the first concave-convex structure in a second direction is greater than a width of the at least one raised structure in the second direction, wherein the second direction is perpendicular to the first direction.
4 more elements
Dependencies are inferred from the claim text.