Wafer placement table
AssigneeNGK Insulators, Ltd.
InventorsTaro Usami, Yohei Kajiura, Keita Ikegami
Life of this patent
Estimating the term…
Abstract
A wafer placement table includes: a ceramic plate having a wafer placement surface on its upper surface; a cooling plate provided on a lower surface of the ceramic plate; and a refrigerant flow path provided inside the cooling plate, wherein the refrigerant flow path includes a first portion and a second portion, the second portion continuing from the first portion and being divided into two or more ways forming branches that run side by side, and wherein the first portion has a cross-sectional area smaller than a sum of cross-sectional areas of the respective branches included in the second portion.
Claims9
A wafer placement table comprising:
- a ceramic plate having a wafer placement surface on an upper surface of the ceramic plate;
- a cooling plate provided on a lower surface of the ceramic plate;
- and
- a refrigerant flow path provided inside the cooling plate,
- wherein the refrigerant flow path includes a first portion and a second portion, the second portion continuing from the first portion and being divided into two or more ways forming branches that run side by side, and
- wherein the first portion has a cross-sectional area smaller than a sum of cross-sectional areas of the respective branches included in the second portion, and
- wherein the refrigerant flow path includes a curved turn portion where the flow path is reversely directed, the refrigerant flow path being divided into two ways at a halfway position of the curve in the turn portion such that unevenness in an amount of refrigerant distribution between the branches in the second portion is reduced.
A wafer placement table comprising:
- a ceramic plate having a wafer placement surface on an upper surface of the ceramic plate;
- a cooling plate provided on a lower surface of the ceramic plate;
- and
- a refrigerant flow path provided inside the cooling plate,
- wherein the refrigerant flow path includes a first portion and a second portion, the second portion continuing from the first portion and being divided into two or more ways forming branches that run side by side, and
- wherein the first portion has a cross-sectional area smaller than a sum of cross-sectional areas of the respective branches included in the second portion, and
- wherein the refrigerant flow path is curved preceding the division and divided into a branch that has a tendency continuing from a curve preceding the division, and a branch that temporarily deviates outward of the curve from the tendency of the preceding curve, and such that unevenness in an amount of refrigerant distribution between the branches in the second portion is reduced.
Dependencies are inferred from the claim text.