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US 12,584,943 B2Granted
Method for producing a substrate comprising multiple tips for scanning probe microscopy
AssigneeImec Vzw
InventorsThomas Hantschel, XiuMei Xu
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AssigneeImec Vzw
InventorsThomas Hantschel, XiuMei Xu
Estimating the term…
One embodiment of the present disclosure is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate is produced or provided comprising a plurality of nano-sized tips, preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions, wherein each mask portion covers at least one tip, whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals having each at least one nanotip on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type.
A method for producing a substrate comprising multiple tips for scanning probe microscopy, the method comprising the steps of:
A method of using of a substrate comprising a plurality of nano-sized tips on its surface, the tips being integral with the material of the substrate and interspaced at distances lower than 1 micrometer from each other, for performing an SPM measurement, by attaching a sample to an apex region of a tip-shaped sample carrier attached at the end of a cantilever, and moving the sample relative to one or more of the tips.
Dependencies are inferred from the claim text.