Electrode pattern structure of concentric-circular-structured electrostatic chuck

An electrode pattern structure of a concentric-circular-structured electrostatic chuck, wherein the electrode pattern structure comprises:

• a center of the electrostatic chuck being an electrode-free small circle, which is a center circle, a plurality of concentric circular rings that are of different diameters and are free of electrode coating layer being arranged outboards of the center circle, and referred to as isolation rings, wherein the isolation rings are respectively defined as a first isolation ring, a second isolation ring, and so on, in sequence in an outward direction from the center circle, and are respectively referred to as an mth isolation ring, and between every two adjacent ones of the isolation rings is an electrode ring, where a first electrode ring is arranged between the center circle and the first isolation ring;
• a second electrode ring is arranged between the first isolation ring and the second isolation ring;
• and so on, so that an mth electrode ring is arranged between the (m−1)th isolation ring and the mth isolation ring, and an (m+1)th electrode ring is arranged between the mth isolation ring and the (m+1)th isolation ring;
• wherein in the electrostatic chuck having a number of x electrodes, the mth electrode ring is provided with a number of x linear isolation strips each having a length extending in a diameter direction, each of the linear isolation strips have two ends respectively connected to the (m−1)th isolation ring and the mth isolation ring corresponding thereto such that the mth electrode ring is divided into x sections of electrode arc-bands by the number of x linear isolation strips, and the mth isolation ring is formed with an orifice at a site corresponding to each of the linear isolation strips, such that the mth isolation ring is connected to the linear isolation strip at one side of the orifice and the mth isolation ring at the other side of the orifice is spaced from the linear isolation strip, and the mth electrode ring is electrically connected to the (m+1)th electrode ring by the orifices, the orifice is referred to as an inter-ring connection opening.