Conveying device
AssigneeKabushiki Kaisha Shinkawa
InventorsJin Li, Hiroshi Kikuchi, Satoshi Enokido
Life of this patent
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Abstract
This conveying device 1 comprises: a chuck 2 that contactlessly holds a semiconductor chip 103 to face a holding surface 2B; and a guide 3 that has a guide probe 9 capable of abutting a chip side surface 103s of the semiconductor chip 103, and for the semiconductor chip 103 held by the chuck 2, the guide probe 9 limits the movement of the semiconductor chip 103 in the lateral direction which intersects a normal N to the holding surface 2B. The guide probe 9 is capable of reciprocating movement in which a probe tip 9a moves towards and away from the holding surface 2B.
Claims5
A conveying device, comprising:
- a chuck part configured to hold an object, which is a semiconductor chip or a semiconductor wafer, in a non-contact manner to face a holding surface;
- and
- guide parts having a plurality of guide probes that are columnar and capable of abutting a side surface of the object at intervals and, for the object held by the chuck part, the guide probes limiting movement of the object in a lateral direction that intersects a direction of a normal of the holding surface,
- wherein each of the guide probes is capable of performing reciprocating movement in which a tip of corresponding one of the guide probes expands and contracts with respect to the holding surface,
- the guide probes comprise a first guide probe provided on a guide part and extending in a direction inclined with respect to the direction of the normal, and a second guide probe provided on another guide part and extending in a direction inclined with respect to the direction of the normal,
- a separation width between a tip of the first guide probe and a tip of the second guide probe is larger than a separation width between a base end of the first guide probe and a base end of the second guide probe, and
- the tip of the first guide probe and the tip of the second guide probe are rounded.
Dependencies are inferred from the claim text.