Electrostatic chuck device and sleeve for electrostatic chuck device

An electrostatic chuck device comprising:

• a substrate,
• a stack containing at least an internal electrode stacked on top of the substrate,
• a ceramic layer stacked on an upper surface of the stack in a thickness direction,
• a through-hole penetrating through the substrate and the stack in the thickness direction,
• a sleeve formed from an insulating material and inserted in the through-hole, an upper surface of the sleeve in the thickness direction including a two-level structure having a first upper surface positioned coplanar with an upper surface of the substrate in the thickness direction, and a second upper surface positioned above the first upper surface in the thickness direction and disposed proximate to the ceramic layer, an edge portion of the stack in a plan view being disposed on top of the first upper surface,
• wherein a space between an outside surface of the edge portion and an outside surface between the first upper surface and the second upper surface is either (i) filled with a filler or (ii) left as a void.