Lid separation device for vacuum chamber

A lid separator for a vacuum processing chamber, comprising:

• a shaft having a first end and an opposing second end, wherein the shaft is threaded along at least a first portion of the shaft, and wherein the shaft includes a first step having a first reduced diameter disposed adjacent to the first portion and a second step having a second reduced diameter, smaller than the first reduced diameter, disposed adjacent to the first step and between the first step and the first end of the shaft;
• a bushing disposed about the shaft adjacent to a first shoulder of the shaft defined by the first step;
• a contact pad disposed about the shaft adjacent to a second shoulder of the shaft defined by the second step, the contact pad having an outer diameter greater than an outer diameter of the shaft, a recess disposed in a first side of the contact pad, and a central opening disposed through a second side of the contact pad, opposite the first side, and into the recess, wherein the shaft is coupled to the contact pad, wherein the first end of the shaft extends through the central opening and into the recess without reaching the first side of the contact pad, and wherein the first portion and the second end of the shaft extend away from the second side of the contact pad;
• and
• a retaining ring disposed in an annular groove disposed about the second step of the shaft, wherein the retaining ring is configured to retain the bushing and the contact pad on the shaft.