Capacitive sensing circuit and capacitive sensing method

Abstract

Provided is a capacitive sensing circuit and capacitive sensing method. The circuit includes a charge pump, a micro-electro-mechanical system (MEMS) chip, an analog signal modulator configured to perform analog signal modulation to an output signal of the MEMS chip and an output signal of the analog signal modulator, and a digital signal modulator configured to perform digital signal modulation to the output signal of the analog signal modulator, and output a modulated signal by a digital interface. By directly using the input signal of the MEMS chip and the output signal of the analog signal modulator as the input signal for analog modulation, the harmonic distortion is reduced.

Dependencies are inferred from the claim text.