Manufacturing method for memory structure
AssigneeWinbond Electronics Corp.
InventorsShu-Ming Li, Tzu-Ming Ou Yang, Chung-Ming Yang
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AssigneeWinbond Electronics Corp.
InventorsShu-Ming Li, Tzu-Ming Ou Yang, Chung-Ming Yang
Estimating the term…
A manufacturing method for a memory structure including the following steps is provided. A bit line structure is formed on the substrate. A contact structure is formed on the substrate on one side of the bit line structure. A capacitor structure is formed on the contact structure. The capacitor structure includes a first electrode, a second electrode and an insulating layer. The first electrode is disposed on the contact structure in a misaligned manner. The first electrode includes a first bottom surface and a second bottom surface. The first bottom surface is lower than the second bottom surface. The first bottom surface is disposed on the contact structure. The second electrode is located on the first electrode. The insulating layer is disposed between the first electrode and the second electrode.
A manufacturing method for memory structure, comprising:
Dependencies are inferred from the claim text.