Wafer carrier with reticle template for marking reticle fields on a semiconductor wafer
AssigneeMicron Technology, Inc.
InventorGabe Glass
Life of this patent
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AssigneeMicron Technology, Inc.
InventorGabe Glass
Estimating the term…
A wafer carrier assembly comprising a wafer carrier having a first and second side, the first side including: a circular recess configured to receive a semiconductor device wafer, and at least one cut-out arranged along the circumference of the circular recess. The first side also includes a carrier cover having a top and bottom side, the top side including: a plurality of gridlines extending to edges of the carrier cover, and a plurality of reticles extending from the top side to the bottom side where subsets of reticles are arranged to have a common center and each subset of reticles is arranged at each intersection of the plurality of gridlines.
A wafer carrier assembly comprising:
A wafer carrier cover comprising:
A method of marking a semiconductor wafer placed in a wafer carrier having a wafer carrier cover, comprising:
Dependencies are inferred from the claim text.