Replacing end effectors in semiconductor processing systems

A semiconductor processing system, comprising:

• a front-end wafer handling module;
• a load lock module connected to the front-end wafer handling module, the load lock module having a first stage and a second stage;
• a back-end wafer handling module connected to the load lock module, the back-end wafer handling module mounting a first end effector and a second end effector;
• a processing module connected to the back-end wafer handling module, the processing module having a first processing stage and a second processing stage;
• a first end effector jig fixed to the first stage of the load lock module;
• and
• a second end effector jig fixed to the second stage of the load lock module;
• a carried sensor carried by the first end effector and configured to acquire a replacement end effector target position using the carried sensor while transferring a camera wafer between the first stage and the first end effector,
• wherein placement of the first end effector in the first processing stage of the processing module corresponds to alignment of the first end effector to the first end effector jig, and
• wherein placement of the second end effector in the second processing stage of the processing module corresponds to alignment of the second end effector to the second end effector jig.

An end effector jig for aligning a replacement end effector to a load lock module in a semiconductor processing system, comprising:

• a stage surface with a stage alignment aperture and a stage fixation aperture;
• an end effector surface with an end effector alignment aperture, an end effector fixation aperture, and a step;
• a stage pin and a stage fastener configured for alignment and fixation of the end effector jig to a stage of the load lock module;
• and
• an end effector pin set configured for alignment and fixation of the replacement end effector to the stage of the load lock module, wherein the step is arranged between stage surface and the end effector surface to allow the replacement end effector to overlay the end effector jig.