Method for monitoring, determining the position of, and positioning a pin-lifting system

A method for position determination for a coupling of a pin lifter device, in particular a pin lifter, wherein the pin lifter device is arranged at a vacuum process chamber and is designed for moving and positioning a substrate, in particular a wafer or ring, in a process atmosphere region which can be provided by the vacuum process chamber, and includes

• the coupling having a support pin and
• a drive unit having an electric motor, which is designed and interacts with the coupling in such a way that the coupling is linearly adjustable along an adjustment axis from
• a lowered normal position, in particular for providing the support pin in an essentially inactive state with respect to its intended effect, into
• an individual active position, in particular for providing the intended effect of receiving and/or providing the substrate by way of the support pin,
• and back,
• wherein the method for position determination includes
• providing a reference substrate in the vacuum process chamber,
• progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor,
• comparing the present motor current information to an item of target current information,
• deriving an item of state information based on the comparison moving the coupling along the adjustment axis,
• bringing the support pin into contact with the reference substrate, and
• deriving a contact point on the basis of the progressive comparison of the present motor current information to an item of target current information,
• wherein the contact point represents a position of the coupling along the adjustment axis.

A method for positioning a coupling of a pin lifter device, in particular a pin lifter, wherein the pin lifter device is arranged at a vacuum process chamber and is designed for moving and positioning a substrate, in particular a wafer or ring, in a process atmosphere region which can be provided by the vacuum process chamber, and includes

• the coupling having a support pin and
• a drive unit having an electric motor, which is designed and interacts with the coupling in such a way that the coupling is linearly adjustable along an adjustment axis from
• a lowered normal position, in particular for providing the support pin in an essentially inactive state with respect to its intended effect, into
• an individual active position, in particular for providing the intended effect of receiving and/or providing the substrate by way of the support pin,
• and back,
• wherein the method for positioning includes
• receiving a contact point and
• activating the electric motor in such a way that the coupling is moved along the adjustment axis in a contact position corresponding to the contact point.

A pin lifter system, in particular a pin lifter system, which is designed for moving and positioning a substrate, in particular a wafer, in a process atmosphere region which can be provided by vacuum process chamber, having

• at least one pin lifter device individually activatable for moving and positioning the substrate having
• a coupling, which is designed for receiving a support pin embodied for contacting and supporting the substrate, and
• a drive unit having an electric motor, which is designed and interacts with the coupling in such a way that the coupling is linearly adjustable along an adjustment axis from
• a lowered normal position, in particular for providing the support pin in an essentially inactive state with respect to its intended effect, into
• an individual active position, in particular for providing the intended effect of receiving and/or providing the substrate by way of the support pin,
• and back, and
• a control and processing unit, which is connected to the drive unit and designed for controlling the electric motor, wherein
• the control and processing unit is configured to
• progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor,
• comparing the present motor current information to an item of target current information, and
• deriving an item of state information based on the comparison.