Pin lifting device

A pin lifting device configured to move and position a substrate to be processed, in a process atmosphere region provided by a vacuum process chamber, comprises:

• a housing which extends along an adjustment axis, a frontal housing end which is arranged at a first end region of the housing and has a housing opening, and a drive part which is arranged at a second end region of the housing, an adjusting device having a part movable in the housing in a direction of the adjustment axis, a guide section for the adjusting device formed internally on the housing between a first stop at the frontal housing end and a second stop remote therefrom, a coupling leading from the adjusting device through the housing opening for carrying a support pin, wherein
• a tight connecting device which is formed inside the housing between the frontal housing end and the adjusting device and which is formed and fastened to the frontal housing end and to the adjusting device in such a way that access through the housing opening leads only into a first inner region which is closed off by the tight connecting device and the adjusting device, and
• a connecting channel extending from the first stop to the second stop at the guide section and ensuring the connection of a second inner region between the housing, the frontal housing end, the connecting device, the adjusting device and the drive part.