Apparatus and method for manufacturing a display device

An apparatus for manufacturing a display device, the apparatus comprising:

• a chamber;
• a mask assembly arranged in the chamber and facing a display substrate;
• and
• a deposition source arranged in the chamber, facing the mask assembly, and supplying a deposition material that passes through the mask assembly and is deposited on the display substrate, wherein
• the mask assembly comprises:
• a first mask layer including a first mask opening;
• a stopping layer disposed on the first mask layer and including a plurality of stopping layer openings corresponding to the first mask opening;
• and
• an inorganic layer disposed on the stopping layer and including a plurality of inorganic openings corresponding to the plurality of stopping layer openings,
• the inorganic layer comprises:
• a first inorganic layer;
• and
• a second inorganic layer disposed on the first inorganic layer and having an etching selectivity ratio higher than an etching selectivity ratio of the first inorganic layer, and
• the plurality of inorganic openings comprise:
• a plurality of first inorganic openings arranged in the first inorganic layer;
• and
• a plurality of second inorganic openings arranged in the second inorganic layer and corresponding to the plurality of first inorganic openings.