Semiconductor device and method for manufacturing the same
AssigneeKioxia Corporation
InventorsTatsufumi Hamada, Tomohiro Kuki, Yosuke Mutsuno, Shinichi Sotome, Ryota Suzuki
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AssigneeKioxia Corporation
InventorsTatsufumi Hamada, Tomohiro Kuki, Yosuke Mutsuno, Shinichi Sotome, Ryota Suzuki
Estimating the term…
A semiconductor device includes: a first stacked film including first electrode layers; an insulating layer provided on the first stacked film; a second stacked film provided on the insulating layer and including second electrode layers; and a columnar portion extending through the first stacked film, the insulating layer, and the second stacked film. The columnar portion extending in the insulating layer includes a first portion having a first width in a second direction intersecting the first direction, and a second portion provided at a different location along the first direction and having a second width in the second direction. The columnar portion extending in the second stacked film includes a third portion having a third width along the second direction. The second width is larger than the first width and the third width.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.