Method of manufacturing capacitor connecting line of memory
AssigneeChangxin Memory Technologies, Inc.
InventorYang Chen
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AssigneeChangxin Memory Technologies, Inc.
InventorYang Chen
Estimating the term…
The present disclosure provides a method of manufacturing a capacitor connecting line of a memory and a memory. The method of manufacturing includes: forming a bit line layer and a first dielectric layer on a substrate sequentially; patterning the bit line layer and the first dielectric layer, and forming bit line structures arranged at intervals along a first direction and dielectric structures on tops of the bit line structures; forming an insulating layer on the substrate with the bit line structures and the dielectric structures formed thereon, to completely cover the bit line structures and the dielectric structures; forming second isolation structures arranged at intervals between adjacent bit line structures; and forming conductive structures between first isolation structures and the second isolation structures, and forming storage node contact structures.
A method of manufacturing a capacitor connecting line of a memory, comprising:
Dependencies are inferred from the claim text.