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US 12,004,268 B2Granted
Transferring unit, substrate treating apparatus including the same, and substrate treating method
AssigneeSemes Co., Ltd.
InventorJi-Hwan Lee
Life of this patent
Estimating the term…
Abstract
A transferring unit, a substrate treating apparatus including the same, and a substrate treating method are provided. The substrate treating apparatus includes a support plate, a plurality of protrusions protruding upward from the support plate to support a substrate, a temperature adjusting member provided in the support plate to heat or cool the substrate, and an ultrasound applying member to apply an ultrasound between the substrate placed on the plurality of protrusions and the support plate.
Claims13
A substrate treating apparatus comprising:
- a support plate;
- a plurality of protrusions protruding upward from the support plate to support a substrate;
- a temperature adjusting member provided in the support plate to heat or cool the substrate;
- and
- an ultrasound applying member configured to apply an ultrasound between the substrate placed on the plurality of protrusions and the support plate,
- wherein the ultrasound applying member applies the ultrasound in a direction parallel to the substrate.
3 more elements
A substrate treating apparatus comprising:
- a housing;
- a heating unit including a heating plate positioned inside the housing to heat a substrate;
- and
- a transferring unit positioned inside the housing to transfer the substrate from the heating plate,
- wherein the transferring unit includes,
- a transferring plate configured to place the substrate,
- protrusions protruding upward from the transferring plate to support the substrate,
- a cooling unit configured to cool the substrate which is heated, and
- an ultrasound applying member configured to apply an ultrasound between the substrate and the transferring plate,
- wherein the ultrasound applying member applies the ultrasound in a direction parallel to the substrate.
7 more elements
A transferring unit comprising:
- a transferring plate configured to place a substrate;
- protrusions protruding upward from the transferring plate to support the substrate;
- a cooling unit provided in the transferring plate to cool the substrate which is heated;
- and
- an ultrasound applying member configured to apply an ultrasound between the substrate and the transferring plate,
- wherein the ultrasound applying member is provided to apply the ultrasound in a direction parallel to the substrate.
3 more elements
Dependencies are inferred from the claim text.