Planarized layer forming apparatus, and method of manufacturing article

A method of manufacturing an article, comprising:

• forming a planarized layer on a substrate using a planarized layer forming apparatus including:
• a pressing member holder configured to hold the pressing member;
• a substrate holder configured to hold the substrate;
• a curing device configured to cure the curable composition on the substrate;
• and
• a chamber configured to contain the pressing member holder and the substrate holder, and form a sealed space;
• and
• a sealing member arranged between the curing device and the pressing member, wherein the pressing member holder also holds the sealing member to form a closed space between the pressing member and the sealing member, and
• wherein the curable composition on the substrate is caused to come into contact with the pressing member by causing a pressure inside the closed space to increase, causing the pressing member to deform to have a convex shape toward the substrate,
• after the contact, holding of the pressing member by the pressing member holder is released, and a space inside the chamber is pressurized, and
• in a state where holding of the pressing member by the pressing member holder is released and the space inside the chamber is pressurized, the planarized layer is formed by curing the curable composition by the curing device;
• and
• processing the substrate on which the planarized layer has been formed,
• wherein the article is manufactured from the processed substrate.