Imprint apparatus, imprint method, and article manufacturing method

An article manufacturing method comprising:

• forming a pattern on a substrate using an imprint apparatus that forms the pattern in a plurality of shot regions of a substrate by bringing a pattern region of a mold into contact with an imprint material and curing the imprint material, the imprint apparatus comprising:
• a deformation mechanism configured to deform the pattern region, the deformation mechanism including an actuator configured to apply a force to a side surface of the mold,
• wherein, for each shot region, after first processing of applying a first deformation amount to the mold by applying the force to the side surface of the mold by the actuator is executed, second processing of curing the imprint material is executed in a state in which the imprint material and the pattern region are in contact with each other and a second deformation amount is applied to the mold during the second processing by applying the force to the side surface of the mold by the actuator to reduce an overlay error between the shot region and the pattern region while curing the imprint material, and
• wherein the first deformation amount is always larger than the second deformation amount with respect to the plurality of shot regions, or the first deformation amount is always smaller than the second deformation amount with respect to the plurality of shot regions;
• performing processing of the substrate on which the pattern is formed in the forming;
• and
• manufacturing an article from the processed substrate.