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US 11,309,206 B2Granted
Electro static chuck
AssigneeMiCo Ceramics Ltd.
InventorsJeonghun Hwang, Hankyun Yoo, Sangbum Cho
Life of this patent
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Abstract
Disclosed is an electro static chuck. Disclosed is an electro static chuck which includes: a base substrate; and an electro static chuck plate fixed onto the base substrate and including a plurality of electrodes to which biases for chucking and dechucking are applied, in which the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle of the spiral pattern is 360°n (n is a real number of 1 to 2).
Claims12
An electro static chuck comprising:
- a base substrate;
- and
- an electro static chuck plate fixed onto the base substrate and including a plurality of electrodes to which biases for chucking and dechucking are applied,
- wherein each of the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle of the spiral pattern is 360° *n, n being a real number of 1 to 2, and
- wherein the plurality of electrodes include a plurality of electrode patterns and a plurality of electrode gaps among the plurality of electrode patterns, and a length of a center line of the electrode gap is 1.1 to 5 times a length of a center line of the electrode pattern.
2 more elements
An electro static chuck comprising:
- an insulating layer;
- an electrode layer on the insulating layer;
- and
- a dielectric layer on the electrode layer,
- wherein the electrode layer includes a plurality of electrodes for receiving biases for chucking and dechucking, and
- each of the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle is 360° *n, n being a real number of 1 to 2, and
- wherein the plurality of electrodes include a plurality of electrode patterns and a plurality of electrode gaps among the plurality of electrode patterns, and a length of a center line of the electrode gap is 1.1 to 5 times a length of a center line of the electrode pattern.
4 more elements
Dependencies are inferred from the claim text.