Electrostatic chuck and electrostatic adsorption apparatus having the same

An electrostatic adsorption apparatus, the apparatus comprising:

• an electrostatic chuck having through holes;
• a light emitting unit on one side of the electrostatic chuck corresponding to the through holes;
• and
• a light receiving unit on an other side of the electrostatic chuck corresponding to the through holes,
• wherein the electrostatic chuck comprises:
• a base;
• a cushion layer on the base;
• an electrode layer on the cushion layer;
• and
• a dielectric layer on the electrode layer,
• wherein the base, the cushion layer, the electrode layer, and the dielectric layer have the through holes, the through holes each have a rectangular shape, and each of the through holes has a central axis, and
• wherein each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.