Measuring device for a scanning probe microscope and method for scanning probe microscopy of a measurement sample by means of a scanning probe microscope

A method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope, comprising the steps of:

• arranging a measurement sample on a sample receptacle of a scanning probe microscope;
• and
• examining by probe microscopy the measurement sample by means of a measurement probe which is arranged on a probe holder and has a probe tip;
• Wherein,
• the measuring probe and the sample receptacle are moved relative to each other by means of a displacement device in such a manner that the measuring probe executes a raster movement relative to the measurement sample in at least one spatial direction;
• a control device, which is connected to the displacement device, controls the relative movement between the measuring probe and the sample receptacle;
• by means of a sensor device, during the relative movement between the measuring probe and the sample receptacle, movement measurement signals are detected during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle, said absolute measurement being carried out during the relative movement between the measuring probe and the sample receptacle;
• the movement measurement signals are relayed to the control device;
• and
• the control device further controls the relative movement between the measuring probe and the sample receptacle as a function of the movement measurement signals.