Back to results
US 11,114,481 B2Granted
Capacitor including first electrode, dielectric layer, and second electrode, image sensor, and method for producing capacitor
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsYuuko Tomekawa, Takahiro Koyanagi, Takeyoshi Tokuhara
Life of this patent
Estimating the term…
Abstract
A capacitor includes a first electrode, a second electrode facing the first electrode, and a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes. The dielectric layer has a thickness of 10 nm or more. The first electrode contains carbon. At the interface between the dielectric layer and the first electrode, an elemental percentage of carbon is 30 atomic % or less.
Claims14
A capacitor comprising:
- a first electrode;
- a second electrode facing the first electrode;
- and
- a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes, wherein:
- the dielectric layer has a thickness of 16 nm or more,
- the first electrode contains carbon,
- the dielectric layer contains carbon, and
- in a middle portion of the first electrode between an uppermost surface of the first electrode facing the dielectric layer and a lowermost surface of the first electrode opposed to the uppermost surface, an elemental percentage of carbon is 30 atomic % or less.
5 more elements
An image sensor comprising:
- at least one selected from the group consisting of a photoelectric transducer and a photodiode;
- and
- a capacitor, wherein:
- the capacitor includes:
- a first electrode;
- a second electrode facing the first electrode;
- and
- a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes,
- the dielectric layer has a thickness of 16 nm or more,
- the first electrode contains carbon,
- the dielectric layer contains carbon, and
- in a middle portion of the first electrode between an uppermost surface of the first electrode facing the dielectric layer and a lowermost surface of the first electrode opposed to the uppermost surface, an elemental percentage of carbon is 30 atomic % or less.
9 more elements
A capacitor comprising:
- a first electrode;
- a second electrode facing the first electrode;
- and
- a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes, wherein:
- the dielectric layer has a thickness of 16 nm or more,
- the first electrode contains carbon,
- the dielectric layer contains carbon, and
- in an uppermost surface of the first electrode facing the dielectric layer, an elemental percentage of carbon is 3 atomic % or more and 30 atomic % or less.
5 more elements
An image sensor comprising:
- at least one selected from the group consisting of a photoelectric transducer and a photodiode;
- and
- a capacitor, wherein:
- the capacitor includes:
- a first electrode;
- a second electrode facing the first electrode;
- and
- a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes,
- the dielectric layer has a thickness of 16 nm or more,
- the first electrode contains carbon,
- the dielectric layer contains carbon, and
- in an uppermost surface of the first electrode facing the dielectric layer, an elemental percentage of carbon is 3 atomic % or more and 30 atomic % or less.
9 more elements
Dependencies are inferred from the claim text.